Department of Physics and Astronomy

University of Mississippi

Events

Event Information:

  • Tue
    05
    Sep
    2017

    Colloquium: MEMS Microphones

    4:00 pmLewis 101

    Vahid Naderyan
    Department of Physics and Astronomy
    University of Mississippi

    MEMS Microphones

    MEMS (Micro-Electro-Mechanical Systems) microphones are acoustic sensors which translate sound waves to an electrical signal. Recent developments in MEMS technology have led to the development of very small size and high-performance microphones. Silicon fabrication creates the MEMS elements with the geometries of the order of microns. Due to their small size and high performance, MEMS microphones are used in mobile phones, hearing aids, “Internet of Things” devices, small electronic devices, etc. In this talk, I will explain the basic principles of the capacitive MEMS microphones and will talk about the Acoustical, Mechanical, and Electrical domains in a MEMS microphone and their connections.