Tue05Sep20174:00 pmLewis 101
Colloquium: MEMS Microphones
Department of Physics and Astronomy
University of Mississippi
MEMS (Micro-Electro-Mechanical Systems) microphones are acoustic sensors which translate sound waves to an electrical signal. Recent developments in MEMS technology have led to the development of very small size and high-performance microphones. Silicon fabrication creates the MEMS elements with the geometries of the order of microns. Due to their small size and high performance, MEMS microphones are used in mobile phones, hearing aids, “Internet of Things” devices, small electronic devices, etc. In this talk, I will explain the basic principles of the capacitive MEMS microphones and will talk about the Acoustical, Mechanical, and Electrical domains in a MEMS microphone and their connections.